Research Interests
Silica nano particle synthesis, (chemical and mechanical polishing )CMP
1. The silica nano-particle synthesis of CMP.
2. The mechanism reach of silicon wafer in CMP process.
3. The mechanism reach of TEOS wafer in CMP process.
Biography
Associate Professor, Dalian Institute of Chemical Physics, CAS, 2020/01 - present
Assistant Professor, Dalian Institute of Chemical Physics, CAS, 2015/01 - 2020/01
Ph.D, chemical engineering, Dalian Institute of Chemical Physics, CAS, 2015/09 - 2021/07
Honors and Awards
Publications
1. G. Ren, H. Su, S. Wang, The combined method to synthesis silica nanoparticle by St?ber process. J Sol-Gel Sci Techn 96, 108-120 (2020).
2. X. Li, H. Su, G. Ren, S. Wang, The role of MgO in the performance of Pd/SiO2/cordierite monolith catalyst for the hydrogenation of 2-ethyl-anthraquinone. Applied Catalysis A: General 517, 168-175 (2016).
3. X. Li, H. Su, G. Ren, S. Wang, Effect of metal dispersion on the hydrogenation of 2-amyl anthraquinone over Pd/Al 2 O 3 catalyst. Journal of the Brazilian Chemical Society 27, 1060-1066 (2016).
4. X. Li, H. Su, G. Ren, S. Wang, A highly stable Pd/SiO 2/cordierite monolith catalyst for 2-ethyl-anthraquinone hydrogenation. Rsc Adv 5, 100968-100977 (2015).
5. M. Su et al., Mesoporous silica with monodispersed pores synthesized from the controlled self-assembly of silica nanoparticles. Korean J Chem Eng 32, 852-859 (2015).
6. M. Su et al., Effect of drying technique on the morphological and textural characteristics of mesoporous silica synthesized in the microreactor. J Sol-Gel Sci Techn 73, 460-468 (2015).
7. M. Su et al., The properties of silica nanoparticles with high monodispersity synthesized in the microreactor system. J Sol-Gel Sci Techn 72, 375-384 (2014).