Time: March 21th, 2019, 9:00 am
Venue: 3rd Floor Conference Room, State Key Laboratory of Catalysis A
Lecturer: LI Yang
It has been demonstrated that it is beneficial for high rate deposition of silicon based solar cell material using VHF over RF PECVD. However, uniformity becomes a significant challenge when the cathode size approaches to 1/4 wavelength. In this discussion, the development process for a large area VHF cathode aimed for a RTR deposition system is presented. The emphasized areas are on the approach and practical design, setup issues we had experienced. The success, failure and lesson learned are hopefully helping future development.
Doctor LI Yang obtained his PhD in electrical engineering department in the solid state electronic area. Before joined United Solar division, he spent about 8 years in the field of hydrogen storage system development. After transferred to the solar division, he devoted the next 6 years lead the development of large area VHF cathode for silicon based solar cell thin film deposition. The proof of concept cathode achieved uniformity goals.
Contact: WANG Hui, DNL1606